1. Yin-Wen Lee

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    1. Mentioned In 2 Articles

    2. Feature Of The Week 08/31/2018: Spectroscopic Characterization of Si/Mo Thin-film Stack at Extreme Ultraviolet Range

      Feature Of The Week 08/31/2018: Spectroscopic Characterization of Si/Mo Thin-film Stack at Extreme Ultraviolet Range
      Using extreme ultraviolet (EUV) radiation for nanoscale imaging has recently seen much interest. As actinic patterned mask inspection tools are not available, chipmakers have to rely on wafer inspection to identify mask defects. To fulfill the requirements of mask inspection, EUV sources with high brightness, high stability (spatial and temporal), and cost effectiveness are needed. In a laser-produced-plasma (LPP) generated EUV system, a high-intensity laser beam is focused onto a ...
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    3. Spectroscopic characterization of Si/Mo thin-film stack at extreme ultraviolet range

      Spectroscopic characterization of Si/Mo thin-film stack at extreme ultraviolet range
      A noninvasive method for characterizing Si/Mo thin-film stack thickness and its complex transfer function using common-path optical coherence tomography is proposed, analyzed, and experimentally demonstrated. A laser-produced plasma (LPP)-based extreme ultraviolet (EUV) source was excited by a four-stage nanosecond Yb:fiber laser amplifier with a pulse energy of 1.01 mJ. The tabletop LPP EUV source was compact and stable for generating the EUV interference fringes. The measured ...
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  2. About Yin-Wen Lee

    Yin-Wen Lee

    Yin-Wen Lee received the M.S. degree in Electrical Engineering from National Tsinghua University in 2000, and the Ph.D. degree in Applied Physics from Stanford University in 2008. Her doctoral research centered on high-power fiber lasers and amplifiers, with special focus on power scaling capabilities of Yb 3+ -doped phosphate fibers. From 2008 to 2010, she was a Post-Doc research scientist in OFS Labs., where she was engaged in developing state-of-the-art kW-class fiber amplifiers and Raman fiber lasers. After a Post-Doc position at National Taiwan University, where she worked on development of pulsed Yb 3+ -doped fiber laser sources for efficient EUV generation, she joined Electric-Optic Engineering at National Taipei University of Technology as an assistant professor in 2012, and became an associate professor in 2017. Her current research interests are investigating advanced fiber laser dopants and glass hosts to extend the accessible wavelength range of ultrafast fiber lasers as well as developing advanced Yb 3+ -doped fiber laser systems for the applications in material processing, optical coherence tomography, medical surgery instruments, and environmental /gas sensing.