MEMS micromirror with dual-reflective surfaces for circumferential scanning endoscopic OCT imaging

Entities Mentioned

• University of Florida
• Huikai Xie
• Lei Wu

1. 

   Feature Of The Week 3/8/09. Optical endoscopic imaging based on high-resolution, cross-sectional imaging techniques such as optical coherence tomography and non-linear optical imaging has demonstrated a great potential for non-invasive, in vivo clinical applications especially after MEMS probe scanning mirrors are employed as the scanning mechanisms. For intravascular and some internal organ imaging applications, imaging probes with full circumferential scanning (FCS) capability are highly desired. Professor Huikai Xie, PhD Student Lei Wu, and others from the University of Florida, have made some very impressive MEMS scanner designs. This video shows a dual-reflective MEMS mirror using a dual-folded electrothermal bimorph actuator that has a large angular scan range and a fixed rotational axis. The mirror plate is highly reflective on both sides. Therefore, by combining the reflected beams from the both mirror surfaces, a 90º mechanical rotation of the mirror plate can achieve a full circumferential (360º) optical scan. The fabricated device demonstrates a good mirror flatness of up to 0.65 m radius of curvature and a fast response with the cut-off frequency beyond its mechanical resonance (447Hz). For more information see Article 1, Article 2, and Article 3. Submit your image using feedback link below.

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