1. Investigation of sputtering target re-deposits by Optical Coherence Tomography and Grazing Incident X-ray Diffraction

    Investigation of sputtering target re-deposits by Optical Coherence Tomography and Grazing Incident X-ray Diffraction

    The sputtering target re-deposit grown by cumulative sputtering has been investigated in this work by studying both fresh and rigorously sputtered zirconium oxide target by Fourier Domain Optical Coherence Tomography (FDOCT), a depth resolved optical imaging modality. The Optical Coherence Tomography (OCT) depth profiles have further been analyzed to extract optical attenuation coefficient of sputtered target surface as well as fresh target surface. Re-deposited sputtered target surface shows larger optical attenuation coefficient in the range of 1.5-4.4 mm −1 as opposed to that of 1.1 mm −1 for fresh ZrO 2 target. The same sputtered target surfaces ...

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