1. Novel optical-signal acquisition method addresses grand challenges for silicon technology

    Novel optical-signal acquisition method addresses grand challenges for silicon technology
    The superior image definition and nondestructive testing technology provided by optical-coherence tomography targets the characterization issues posed by nanometer-scale devices. The UK's Engineering and Physical Sciences Research Council's recent consultation exercise1 reinforced the belief that future silicon technology will be advanced by new and evolving characterization techniques. Among the grand challenges identified are the development and implementation of nanometer-scale features, 3D structures, and manufacturing quality. The developing market for microelectromechanical systems (MEMS)—which integrate mechanical elements, sensors, actuators, and electronics on a common silicon substrate—provides a proof statement. Driven by the demand for smaller, cheaper, more versatile ...
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