1. Simultaneous tomography and topography of silicon integrated circuits using full-fieldswept-source optical coherence tomography

    Abstract. We demonstrate simultaneous tomography and topography of micro-electro-mechanical systems based on silicon integrated circuits using full-field swept-source optical coherence tomography. The optical set-up consists of a swept-source system, a compact Michelson interferometer, and an area detector. The swept-source system comprises a superluminescent diode as a broadband light source in conjunction with an acousto-optic tunable filter as a fast frequency tuning device. By means of sweeping the frequency of the light source, multiple interferograms were recorded and both the amplitude and the phase map of the interference fringe signal were reconstructed. Optically sectioned images of the silicon integrated circuits were ...
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