1. Quality assessment of the optical thin films using line field spectral domain optical coherence tomography

    Quality assessment of the optical thin films using line field spectral domain optical coherence tomography

    Cross-sectional and three-dimensional images show the effectiveness of the system. In this study, the industrial inspection of optical thin film on touch screen panels was demonstrated using line field spectral domain optical coherence tomography. The conventional Fourier domain optical coherence tomography system requires a single scanner for two-dimensional cross-sectional images and two scanners for volumetric images. Our developed line field spectral domain optical coherence tomography has the advantage of needing only a single scanner for volumetric images, while two-dimensional cross-sectional images are obtained by the parallel acquisition of an illuminated line on a sample using an area camera. Further, the ...

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