1. Point-cloud noncontact metrology of freeform optical surfaces

    Point-cloud noncontact metrology of freeform optical surfaces

    Full Article Figures (16) Tables (2) Equations (14) References (52) Cited By (0) Back to Top Get PDF Abstract In this paper, we demonstrate the development of a point-cloud metrology method for the noncontact, high resolution, high precision testing of freeform surfaces. The method leverages swept source optical coherence tomography together with a common-path setup in the sample arm configured to mitigate the axial jitter caused by scanning and environmental perturbations. The lateral x-y scanning field was also rigorously evaluated for the sampling step, linearity, straightness, and orthogonality. Based on the finely engineered system hardware, a comprehensive system model was ...

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