Design and development of a 3D scanning Mems Oct probe using a novel SiOB package assembly
Abstract. A MEMS optical coherence tomography (OCT) probe prototype was developed using a unique assembly based on silicon optical bench (SiOB) methodology. The probe is formed by integrating a three-dimensional (3D) scanning micromirror, gradient refractive index (GRIN) lens and optical fiber on SiOB substrates having prefabricated self-aligned slots. The two-axis scanning micromirror is based on electrothermal actuation with required voltage less than 2 V for mechanical deflections up to 17°. The optical probe was enclosed within a biocompatible, transparent and waterproof polycarbonate tube with a view of in vivo diagnostic applications. The diameter of the miniature probe is less than ...
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