1. A wafer-level miniaturized Michelson interferometer on glass substrate for Optical Coherence Tomography applications

    A wafer-level miniaturized Michelson interferometer on glass substrate for Optical Coherence Tomography applications

    The wafer-level fabrication of a Michelson interferometer using optical MEMS technologies is presented. The intended application is in Optical Coherence Tomography (OCT). The micro fabrication involves two steps: the 45° saw dicing of glass substrate and the subsequent deposition of a dielectric multilayer and metallic layers to obtain a beam splitter and waveguide micro mirrors, respectively. The Michelson interferometer was designed for use in the near-infrared range of 800–900 nm. A 50/50 non-polarized beam splitter was obtained with only four layers (using titanium dioxide and silicon dioxide). The micro mirrors for the required spectral range were fabricated by ...

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