1. An Evaluation of Silicon Carbide Based Bimorph Actuators for Optical Coherence Tomography Applications

    An Evaluation of Silicon Carbide Based Bimorph Actuators for Optical Coherence Tomography Applications

    Optical coherence tomography (OCT) probes rely on MEMS micro-scanners to provide fast and reproducible scans covering as much area as possible. A popular choice of actuators employed in this role are electrothermal bimorph actuators. They comprise of two layers of different materials which are rigidly joined together. Differential expansion under heating causes the bimorph to deflect. Polycrystalline silicon carbide has been proposed to replace polysilicon as a multi-purpose material in MEMS but it has not been yet explored as a bimorph material. Under this premise, an in-plane bimorph actuator based on doped polycrystalline silicon carbide and silicon was proposed to ...

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