1. Mirror Based Microelectromechanical Systems And Methods

    Mirror Based Microelectromechanical Systems And Methods

    Unlike most MEMS device configurations which simply switch between two positions in many optical devices the state of a MEMS mirror is important in all transition positions. It may determine the characteristics of an optical delay line system and by that an optical coherence tomography system in one application and in another the number of wavelength channels and the dynamic wavelength switching capabilities in the other.

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