1. Interferometer for determining characteristics of an object surface, including processing and calibration

    BACKGROUND The invention relates to interferometry.Interferometric techniques are commonly used to measure the profile of a surface of an object. To do so, an interferometer combines a measurement wavefront reflected from the surface of interest with a reference wavefront reflected from areference surface to produce an interferogram. Fringes in the interferogram are indicative of spatial variations between the surface of interest and the reference surface.A scanning interferometer scans the optic
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