1. Electrothermal microactuator for large vertical displacement without tilt or lateral shift

    Electrothermal microactuator for large vertical displacement without tilt or lateral shift

    A microactuator for displacing a platform vertically with respect to a substrate includes a first rigid frame, a first flexible bimorph beam connecting the first frame to the substrate, a second rigid frame, a second flexible bimorph beam connecting the second frame to the first frame, and a third flexible bimorph beam connecting a platform to the second frame. Activation of the first, second, and third flexible bimorph beams allows vertical displacement of the platform with respect to the substrate, with negligible lateral shift. A microactuator assembly includes a substrate, a plurality of first rigid frames, a plurality of first ...

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