1. Full-field step profile measurement with sinusoidal wavelength scanning interferometer

    Full-field step profile measurement with sinusoidal wavelength scanning interferometer

    A sinusoidal wavelength scanning interferometer is proposed for 3-D profile measurement. The interference phase-shift signal generated by the sinusoidal wavelength scanning contains information of optical path difference (OPD) covering nm-mm scale structure. The interference phase-shift signal was obtained by the four-step phase shifting method. The sinusoidal wavelength shifting bandwidth of 5.7 nm with a frequency of approximately 180 Hz was performed by the Littman-Metcalf external resonator-type tunable laser with a center of 772.1 nm. The full-field step-height surface profile measurement and 3-D surface measurement were conducted by a CCD image sensor with an accuracy of few tens nm ...

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