1. Spectral reflectometry method and device

    Spectral reflectometry method and device

    An optical low-coherence reflectometry with spectral reception for obtaining images without coherent noise caused by self-interference of the radiation scattered from the studied object and by spurious reflections in the optical path of the system is disclosed. Two or more consecutive measurements of the interference spectrum are made. During at least one measurement of the interference spectrum by means of the interference control unit the phase between the interfering parts of the radiation is modulated by a certain law during exposure, which results in averaging and zeroing of the cross-correlation (useful) component of the registered spectrum, and during at least ...

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