1. Spectral-Domain Optical Coherence Tomography for Material Detection

    Spectral-Domain Optical Coherence Tomography for Material Detection

    Optical coherence tomography is a non-invasive cross-sectional imaging technology for inhomogeneous samples. Spectral-domain optical coherence tomography is introduced to measure film and Silicon dovetail groove in this paper. A novel method is used to deal with the interference spectrum to improve the quality of the two-dimensional cross-sectional image. The experimental result shows the microstructure of the two samples can be clearly seen as expected. From the visualized two-dimensional cross-sectional imaging, the film thickness and the dimension of the Silicon dovetail groove are obtained with this technique. It is experimentally demonstrated that this system is useful for imaging the microstructure of ...

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