A two axes scanning Soi Mems micromirror for endoscopic bioimaging

1. A two axes scanning SOI MEMS micromirror for endoscopic bioimaging 1 A-STAR Institute of Microelectronics, Science Park Road, Singapore 117685 2 Division of Bioengineering, NUS, 21 Lower Kent Ridge Road, Singapore 119077 3 National Cancer Centre, 11 Hospital Drive, Singapore 169610 E-mail: janak@ime.a-star.edu.sg Abstract. A novel silicon on insulator (SOI) MEMS process has been designed and developed to realize a two axes thermally actuated single crystal silicon micromirror device, which consi (Read Full Article)

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