Non-Destructive Inspection Methods for LEDs Using Real-Time Displaying Optical Coherence Tomography
In this study, we report the applicability of two different Optical Coherence Tomography (OCT) technologies for inspecting Light Emitting Diode (LED) structures. Sectional images of a LED were captured using a Spectral Domain OCT (SD-OCT) system and a Swept Source OCT (SS-OCT) system. Their center wavelengths are 850 and 1,310 nm, respectively. We acquired cross-sectional two dimensional (2D) images of a normal LED and extracted sectional profiles to inspect possible wire disconnection that may be present in the LED manufacturing process. The SD-OCT and SS-OCT images were compared with each other in the same sample to study their advantages ...
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