A compact circumferential scanned endoscopic imaging probe using a MEMS-driven pyramidal polygon reflector
A novel prototype of electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevron-beam type microactuator and a micro pyramidal polygon reflector. The proposed electrothermal microactuators with a two-stage electrothermal cascaded chevron-beam driving mechanism provide displacement amplification, and thus driving a highly reflective micro-pyramidal polygon reflector to rotate a large angle for light beam scan. This MEMS platform is ultra-compact, supports circumferential imaging capability, and is suitable for endoscopic optical coherence tomography (EOCT) application, for example intravascular cancer detection.