MEMS tunable VCSEL light source for ultrahigh speed 60kHz - 1MHz axial scan rate and long range centimeter class OCT imaging
This paper demonstrates new wavelength swept light source technology, MEMS tunable VCSELs, for OCT imaging. The VCSEL achieves a combination of ultrahigh sweep speeds, wide spectral tuning range, flexibility in sweep trajectory, and extremely long coherence length, which cannot be simultaneously achieved with other technologies. A second generation prototype VCSEL is optically pumped at 980nm and a low mass electrostatically tunable mirror enables high speed wavelength tuning centered at ~1310nm with ~110nm of tunable bandwidth. Record coherence length >100mm enables extremely long imaging range. By changing the drive waveform, a single 1310nm VCSEL was driven to sweep at speeds from ...
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