1. High precision dynamic multi-interface profilometry with optical coherence tomography

    High precision dynamic multi-interface profilometry with optical coherence tomography
    Optical coherence tomography (OCT) has mostly been used for high-speed volume imaging but its profilometry potentials have not been fully exploited. This paper demonstrates high precision (as good as ∼50 nm) multi-interface profilometry using a Fourier domain OCT system without special antivibration devices. The precision is up to 2 orders of magnitude better than the depth resolution of the OCT. Detailed analysis of the precision achieved for different surfaces is presented. The multi-interface profiles are obtained as a by-product of the tomography data. OCT has the advantage in speed and sensitivity at detecting rough and internal interfaces versus conventional optical ...
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