1. Demonstration of PECVD SiC thermal delay lines for optical coherence tomography in the visible

    Demonstration of PECVD SiC thermal delay lines for optical coherence tomography in the visible
    Optical Coherence Tomography (OCT) has found applications in many fields of medicine and has a large potential for the optical biopsy of tumors. One of the technological challenges impairing faster adoption of OCT is the relative complexity of the optical instrumentation required, which translates into expensive and bulky setups. In this paper we report an implementation of Time-Domain Optical Coherence Tomography based on Plasma Enhanced Chemical Vapor Deposition (PECVD) Silicon Carbide (SiC). The devices, with a footprint of 0.3 cm2, are fabricated using rib waveguides defined in a SiC layer. While most of the components needed are known when ...
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