1. Looking for a new generation of MEMS-type confocal microscopes

    Looking for a new generation of MEMS-type confocal microscopes
    In the field of optical scanning microscopy the micro-scale or nano-scale samples are observed and analysed via large macro-tools, too bulky and heavy for individual use in specialised key missions such as in situ or in vivo measuring. A need for compact, robust scanning devices for endoscopic applications has stimulated the development of MEMS scanning mirrors for confocal imaging and for optical coherence tomography. The architecture of proposed on-chip confocal microscope is shown in Fig. 1 [1]. The individual microscope consists of two microlens scanner chips, a beamsplitter, a PIN detector and a pinhole aperture. The microlens scanner chips have ...
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