1. Scanning mirror unit and beam scanning probe

    A scanning mirror unit for scanning a beam comprises: at least one cantilever which is formed by bonding an elastic material and a piezoelectric material together and supported by a base at its one end; and a movable mirror which is supported at least by a free end of the cantilever at its peripheral part. When voltage is applied to the piezoelectric material, the free end of the cantilever moves in a prescribed direction to press and move the peripheral part of the movable mirror while leaving a central part of the movable mirror at substantially the same position to ...
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