Surface profiling using an interference pattern matching template

uspto.gov Oct 30 2007 NDE/NDT , Patents

A method for determining a spatial property of an object includes obtaining a scanning low coherence interference signal from a measurement object that includes two or more interfaces. The scanning low coherence interference signal includes two or more overlapping low coherence interference signals, each of which results from a respective interface. Based on the low coherence interference signal, a spatial property of at least one of the interfaces is determined. In some cases, the determination is based on a subset of the low coherence interference signal rather than on the entirety of the signal. Alternatively, or in addition, the determination ...

Read Full Article

Bookmark or Share this article

Login to comment.

Low coherence grazing incidence interferometry for profiling and tilt sensing also written by Peter J. De Groot
Methods and systems for interferometric analysis of surfaces and related applications also written by Peter J. De Groot
High speed in situ depth profiling of ultrafast micromachining also categorized in NDE/NDT
Interferometric optical systems having simultaneously scanned optical path length and focus also written by Peter J. De Groot
System for medical examination or treatment also published in uspto.gov
Selectable eccentric remodeling and/or ablation of atherosclerotic material also published in uspto.gov
Measurement of complex surface shapes using a spherical wavefront also written by Peter J. De Groot
Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures also written by Peter J. De Groot
Triangulation methods and systems for profiling surfaces through a thin film coating also written by Peter J. De Groot
3-dimensional scanning of grinded optical surfaces based on optical coherence tomography also categorized in NDE/NDT