1. Laser Processing Apparatus For Monitoring Processing State By Using Optical Coherence Tomography Technology (Wo 2009/096750)

    Laser Processing Apparatus For Monitoring Processing State By Using Optical Coherence Tomography Technology (Wo 2009/096750)

    Disclosed is a laser processing apparatus for monitoring a processing state by using optical coherence tomography technology. The disclosed laser processing apparatus comprises: a processing unit that disrupts the molecular binding of a workpiece by using a femtosecond laser beam; a tomographic monitoring unit that monitors a three-dimensional state of the workpiece; and a controller that controls the output of femtosecond laser beam by using a three-dimensional tomographic image. The laser processing apparatus may further include a surface monitoring unit which monitors a surface state of the workpiece. The laser processing apparatus enables active control over its whole processes since ...

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