A dual-reflective electrothermal MEMS micromirror for full circumferential scanning endoscopic imaging
This paper reports the design, fabrication and measurements of a dual-reflective, single-crystal silicon based micromirror that can perform full circumferential scanning (FCS) for endoscopic optical coherence tomography (EOCT). In the proposed FCS-EOCT probe, two optical fibers are used to deliver l ... [Proc. SPIE Int. Soc. Opt. Eng. 6885, 688508 (2008)] published Wed Feb 6, 2008.
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