1. Scanning optimization of an electrothermally-actuated MEMS mirror for applications in optical coherence tomography endoscopy

    Scanning optimization of an electrothermally-actuated MEMS mirror for applications in optical coherence tomography endoscopy

    Probe is an important component of the optical coherence tomography (OCT) system. Electrothermally-actuated micro-electromechanical (MEMS) mirrors are especially suitable for OCT endoscopic imaging due to their large scan angle, low driving voltage and high fill factor. However, endoscopic OCT imaging quality would be seriously affected by the nonlinear scanning characteristics of electrothermal MEMS mirrors as well as the distortion due to the need of placing the MEMS mirror on a 45 slope. In this work, an open-loop control method based on the transfer function of the MEMS mirror is proposed to optimize the overall optical trajectory scanned on the sample ...

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