1. Optical deflection probe and optical deflection probe device

    An optical fiber transmits signal light and the excitation light for driving an actuator each having a different wavelength to a probe. In the probe, the signal light and excitation light are separated from each other by an optical filter and the excitation light is irradiated to a photo diode. The signal light is supplied to a MEMS mirror unit. Then, the MEMS mirror unit is driven by an electromotive force obtained by the photo diode. In this manner, by modulating intensity of the excitation light, the signal light can be deflected
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