Vision-Inspection-Synchronized Dual Optical Coherence Tomography for High-Resolution Real-Time Multidimensional Defect Tracking in Optical Thin Film Industry
Large-scale product inspection is an important aspect in thin film industry to identify defects with a high precision. Although vision line scan camera (VLSC)-based inspection has been frequently implemented, it is limited to surface inspections. Therefore, to overcome the conventional drawbacks, there is a need to extend inspection capabilities to internal structures. Considering that VLSC systems have access to rich information, such as color and texture, high-resolution real-time multimodal optical synchronization between VLSC and dual spectral domain optical coherence tomography (SD-OCT) systems was developed with a laboratory customized in-built automated defect-tracking algorithm for optical thin films (OTFs). Distinguishable differences ...
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