1. Spectroscopic Optical Coherence Tomography for Thin Layer and Foil Measurements

    Spectroscopic Optical Coherence Tomography for Thin Layer and Foil Measurements

    The main goal of this research was to assess if it is possible to evaluate the thickness of thin layers (both thin films on the surface and thin layers below the surface of the tested object) and foils using optical coherence tomography (OCT) for thickness assessment under the resolution of the standard commercially available OCT measurement system. In the proposed solution, light backscattered from the evaluated thin layer has been expressed as a multiple beam interference. Therefore, the OCT system was modeled as a two-beam interferometer (e.g., Michelson), in which one beam propagates from the reference arm and the ...

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